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CVD Analysis Reactor CVD-TR 2

The CVD Test Reactor is designed for the following functions:

  • Testing the deposition function in respect of power supply and mixed gas supply.
  • Testing the ignition of the filaments in respect of temperature and doping.
  • Testing the Poly-Si quality, for evaluating the TCS quality.
  • Testing the graphite adapter connection between the electrodes head and the filaments.

Because the Test-Reactor Set integrates all functions, generally only utility interface connections have to be provided by the user.